Plasma Enhanced Chemical Vapour Depositi
Manufacturer
ModelVISION 310 PECVD
Location
University of Leeds (Identifier: 1)
Contact
Academic Contact
| Prof Prof Edmund Linfield | |
| e.h.linfield@leeds.ac.uk | |
| +44-113-34-32015 |
Technical Contact
| Dr Dr Christopher Day | |
| epi6cd@leeds.ac.uk |