Electron Beam Lithography System
Description
Electron Beam Lithography for FIBSEM
ManufacturerRAITH
ModelDual Beam & Elphy Quantum
Location
Main Campus
Contact
Academic Contact
| Andre Geim | |
| Andre.K.Geim@manchester.ac.uk | |
| +44-161-275-4120 |
Technical Contact
| Ernest Hill | |
| e.w.hill@manchester.ac.uk | |
| +44-161-275-4552 |