The thermal evaporator use thermal heat to heat up a solid target source in a boat such as tungsten boat to its melting temperature, causing atoms to evaporate from the target to coat substrate in the vacuum chamber. Edwards Auto 306 evaporator has a base pressure of 2×10-6mBar pumped with dry rough pump and turbo pump. It has four boats for Ti, Au, Cr, Al evaporation.
Prof Prof Edmund Linfield | |
e.h.linfield@leeds.ac.uk | |
+44-113-34-32015 |
Dr Dr Li Chen | |
l.chen@leeds.ac.uk | |
+44-113-34-35215 |