Description

The thermal evaporator use thermal heat to heat up a solid target source in a boat such as tungsten boat to its melting temperature, causing atoms to evaporate from the target to coat substrate in the vacuum chamber. Edwards Auto 306 evaporator has a base pressure of 2×10-6mBar pumped with dry rough pump and turbo pump. It has four boats for Ti, Au, Cr, Al evaporation.

ManufacturerEDWARDS

ModelAUTO 306

Location

Contact

Academic Contact

Prof Prof Edmund Linfield
e.h.linfield@leeds.ac.uk
+44-113-34-32015

Technical Contact

Dr Dr Li Chen
l.chen@leeds.ac.uk
+44-113-34-35215